@article {69,
	title = {Pd-Ti-MCM-48 cubic mesoporous materials for solar simulated hydrogen evolution.},
	journal = {International Journal of Hydrogen Energy},
	volume = {40},
	year = {2015},
	note = {CAPLUS AN 2014:2091523(Journal; Online Computer File)},
	pages = {905 - 918},
	publisher = {Elsevier Ltd.},
	abstract = {A facile synthetic method (in >=4 h) for simultaneously loading high amts. of TiO2 (Si/Ti = 3) and Pd0 co-catalyst (0.1\% per g of total catalyst) in cubic mesoporous MCM-48 material was developed at room temp.  The solar simulated photocatalytic H evolution from photocatalysts contg. Pd0 and TiO2 nanoclusters in periodic cubic MCM-48 and aperiodic mesoporous SiO2 was compared.  The periodicity of the mesoporous SiO2 support, the oxidn. state of Pd, the location and dispersion of Pd0 have a significant impact on the photocatalytic activity.  Periodic cubic MCM-48 mesoporous SiO2 contg. Pd0 in close contact with TiO2 exhibit superior H evolution rates compared to Pd0-TiO2 contg. aperiodic mesoporous SiO2.  The highly ordered and open 3-dimensional mesoporous cubic MCM-48 support has high surface area and facilitate good dispersion and close contact of TiO2 and Pd0.  At very low loadings of 0.1\% of Pd, H yield is 560 μ mol h-1, which is among the highest reported in the literature for Pd0 contg. TiO2 based materials under solar simulated conditions.  Probably the pore architecture of the support is also an important parameter that governs the photocatalytic activity.  The Pd0-mesoporous materials in general possess higher activity than Pd2+ contg. mesoporous materials.  The photocatalysts were extensively characterized by a variety of techniques such as powder XRD, N sorption anal., transmission and scanning electron microscopic studies, photoluminescence, diffuse reflectance spectroscopy (DRS), CO Chemisorption, and XPS. [on SciFinder(R)]},
	keywords = {zeolite MCM supported palladium titania photocatalysis hydrogen evolution},
	isbn = {0360-3199},
	author = {Peng, Rui and Baltrusaitis, Jonas and Wu, Chia-Ming and Koodali, Ranjit T.}
}
@article {70,
	title = {Phase Composition of Aqueous Urea-Ammonium Nitrate (UAN)-Zinc Nitrate Solutions for Sustainable Reuse of Zinc Containing Industrial Pigment Waste.},
	journal = {ACS Sustainable Chemistry \& Engineering},
	volume = {3},
	year = {2015},
	note = {CAPLUS AN 2015:494326(Journal; Online Computer File)},
	pages = {950 - 958},
	publisher = {American Chemical Society},
	abstract = {Sustainable metal recovery from waste is of utmost importance.  Zn is a micronutrient that is abundant in many industrial wastes.  In this work, the process of converting industrial white pigment waste into a Zn micronutrient contg. nitrogen fertilizers was developed utilizing an HNO3 extn. method.  For this purpose, soly. diagrams, polytherms, were constructed of the ternary CO(NH2)2-Zn(NO3)2-H2O and NH4NO3-Zn(NO3)2-H2O systems to det. the corresponding phase equil. and solid material chem. compn.  Complex salts contg. Zn and two and four urea mols. were obsd. and the catalytic Zn(NO3)2 effect was obsd. at the decompn. temp. of CO(NH2)2 during thermal anal.  Two cryst. phases of NH4NO3, namely III and IV, were obsd. and the corresponding transition temp. decreased with increasing Zn(NO3)2 concn. in soln.  Zn extn. in the form of sol. Zn(NO3)2 was performed from the white pigment industrial waste and optimal extn. parameters including HNO3 concn., stoichiometric amt. and temp. were detd.  These included a 60 {\textdegree}C soln. temp., 55\% HNO3 concn. and 140\% of stoichiometric HNO3 amt.  This agreed well with the reactive conditions currently used in nitrophosphate fertilizer prodn. potentially enabling direct prodn. of micronutrient contg. NP fertilizers without significant technol. modification.  Sensible compns. of UAN-28 and UAN-30 liq. fertilizers contg. Zn micronutrient from industrial grade compds. and pigment waste extd. Zn(NO3)2 were obtained and their physicochem. properties were measured. [on SciFinder(R)]},
	keywords = {zinc nitrate ammonium urea waste},
	isbn = {2168-0485},
	author = {Baltrusaitis, J. and Sviklas, A. M.}
}
@article {71,
	title = {Photocatalytic decomposition of cortisone acetate in aqueous solution.},
	journal = {Journal of Hazardous Materials},
	volume = {282},
	year = {2015},
	note = {CAPLUS AN 2014:1019189(Journal; Online Computer File)},
	pages = {208 - 215},
	publisher = {Elsevier B.V.},
	abstract = {The photocatalytic decompn. of cortisone 21-acetate (CA), a model compd. for the commonly used steroid, cortisone, was studied.  CA was photocatalytically decompd. in a slurry reactor with the initial rates 0.11-0.46 mg/L-min at 10 mg/L concn., using the following heterogeneous photocatalysts in decreasing order of their catalytic activity: ZnO > Evonik TiO2 P25 > Hombikat TiO2 > WO3.  Due to the lack of ZnO stability in aq. solns., TiO2 P25 was chosen for further expts.  The decompn. reaction was found to be pseudo-1st order and the rate const. decreased as a function of increasing initial CA concn.  Changing the initial pH of the CA soln. did not affect the reaction rate significantly.  The decompn. reaction in the presence of the oxidizing sacrificial agent Na persulfate showed an obsd. decompn. rate const. of 0.004/min, lower than that obtained for TiO2 P25 (0.040/min).  The highest photocatalytic degrdn. rate const. was obtained combining both TiO2 P25 and S2O82- (0.071/min) showing a synergistic effect.  No reactive intermediates were detected using LC-MS showing fast photocatalytic decompn. kinetics of CA. [on SciFinder(R)]},
	keywords = {photocatalysis decompn cortisone acetate wastewater},
	isbn = {0304-3894},
	author = {Romao, Joana Sobral and Hamdy, Mohamed S. and Mul, Guido and Baltrusaitis, Jonas.}
}
@article {91,
	title = {Photocatalytic degradation of dye by Ag/ZnO prepared by reduction of Tollen{\textquoteright}s reagent and the ecotoxicity of degraded products.},
	journal = {Korean Journal of Chemical Engineering},
	volume = {31},
	year = {2014},
	note = {CAPLUS AN 2014:166320(Journal; Online Computer File)},
	pages = {587 - 592},
	publisher = {Springer},
	abstract = {A heterostructure of Ag/ZnO powder was prepd. by a redn. of Ag(NH3)2+ ions in a basic soln. or Tollen{\textquoteright}s reagent.  From this method, the existence of a metallic Ag coating on the ZnO surface was confirmed by transmission electron microscope and XPS.  The photocatalytic activity of the Ag/ZnO powders was investigated by analyzing the degrdn. of an aq. methylene blue soln. under a blacklight irradn.  Furthermore, the parameters, including Ag content, catalyst loading, initial dye concn. and pH, were also studied.  After the methylene blue soln. was irradiated for 30min under a blacklight illumination, total mineralization was not obsd. as the presence of some carbon compd. species was indicated in a mass spectrum.  Furthermore, the toxicity of the treated methylene blue soln. produced by the Ag/ZnO powders was also investigated by a test for the inhibition of the growth of Chlorella vulgaris. [on SciFinder(R)]},
	keywords = {silver zinc oxide redn reagent ecotoxicity product dye degrdn},
	isbn = {0256-1115},
	author = {Thongrom, Boonya and Amornpitoksuk, Pongsaton and Suwanboon, Sumetha and Baltrusaitis, Jonas.}
}
@article {92,
	title = {Photoelectrochemical Hydrogen Production on α-Fe2O3 (0001): Insights from Theory and Experiments.},
	journal = {ChemSusChem},
	volume = {7},
	year = {2014},
	note = {CAPLUS AN 2013:1615047(Journal; Online Computer File)},
	pages = {162 - 171},
	publisher = {Wiley-VCH Verlag GmbH \& Co. KGaA},
	abstract = {The photoelectrochem. (PEC) decompn. of org. compds. in wastewater is investigated by using quantum chem. (DFT) methods to evaluate alternatives to water splitting for the prodn. of renewable and sustainable hydrogen.  Methanol is used as a model org. species for the theor. evaluations of electrolysis on the surface of the widely available semiconductor hematite, α-Fe2O3, a widely studied photocatalyst.  Three different α-Fe2O3 surface terminations were investigated, including the predominant surface found in aq. electrolytes, (OH)3-R.  The PEC oxidn. of methanol is energetically downhill, producing CO2 and protons.  The protons are reduced to hydrogen on the cathode.  Exptl. PEC measurements were also performed for several polyalcoholic compds., glycerol, erythritol, and xylitol, on α-Fe2O3 as the photocatalyst and showed high incident-photon-to-current-efficiencies (IPCE) that were much greater than those of water splitting.  Interestingly, high IPCEs were obsd. for hydrogen prodn. from polyalcs. in the absence of any applied bias, which was not thought to be possible on hematite.  These results support the potential application of PEC for hydrogen prodn. by using widely available hematite for the PEC oxidn. of selected components of org. wastewater present in large quantities from anthropogenic and industrial sources. [on SciFinder(R)]},
	keywords = {photoelectrochem hydrogen prodn iron oxide surface theory expt},
	isbn = {1864-5631},
	author = {Baltrusaitis, Jonas and Hu, Yong-Sheng and McFarland, Eric W. and Hellman, Anders.}
}
@article {93,
	title = {Polyamide-thallium selenide composite materials via temperature and pH controlled adsorption-diffusion method.},
	journal = {Applied Surface Science},
	volume = {317},
	year = {2014},
	note = {CAPLUS AN 2014:1526236(Journal; Online Computer File)},
	pages = {818 - 827},
	publisher = {Elsevier B.V.},
	abstract = {Composite materials based on III-VI elements are promising in designing efficient photoelectronic devices, such as thin film org.-inorg. solar cells.  In this work, TlSe composite materials were synthesized on a model polymer polyamide using temp. and pH controlled adsorption-diffusion method via selenization followed by the exposure to the group III metal (Tl) salt soln. and their surface morphol., chem. and cryst. phase information was detd. with particular focus on their corresponding structure-optical property relationship.  XRD anal. yielded a complex cryst. phase distribution which correlated well with the optical and surface morphol. properties measured. pH 11.3 and 80{\textdegree} yielded well defined, low structural disorder composite material surface.  After annealing in N2 at 100{\textdegree}, polycryst. PA-TlxSey composite materials yielded a single TlSe phase due to the enhanced diffusion and reaction of thallium ions into the polymer.  The method described here can be used to synthesize variety of binary III-VI compds. diffused into the polymer at relatively low temps. and low overall cost, thus providing for a flexible synthesis route for novel composite solar energy harvesting materials. [on SciFinder(R)]},
	keywords = {org inorg solar cell polyamide thallium selenide composite, polyamide thallium selenide composite adsorption diffusion synthesis},
	isbn = {0169-4332},
	author = {Ivanauskas, Remigijus and Samardokas, Linas and Mikolajunas, Marius and Virzonis, Darius and Baltrusaitis, Jonas.}
}
@article {111,
	title = {Phenomenon of Quantum Entanglement in a System Composed of Two Minimal Protocells.},
	journal = {Origins of Life and Evolution of Biospheres},
	volume = {43},
	year = {2013},
	note = {CAPLUS AN 2013:302357(Journal; Online Computer File)},
	pages = {49 - 66},
	publisher = {Springer},
	abstract = {The quantum mech. self-assembly of two sep. photoactive supramol. systems with different photosynthetic centers was investigated by means of d. functional theory methods.  Quantum entangled energy transitions from one subsystem to the other and the assembly of logically controlled artificial minimal protocells were modeled.  The systems studied were based on different photoactive sensitizer mols. covalently bonded to a non-canonical oxo-guanine::cytosine supramol. with the precursor of a fatty acid (pFA) mol. attached via Van der Waals forces, all surrounded by water mols.  The electron correlation interactions responsible for the weak hydrogen and Van der Waals chem. bonds increased due to the addn. of polar water solvent mols.  The distances between the sepd. sensitizer, nucleotide, pFA, and water mols. are comparable to Van der Waals and hydrogen bonding radii.  As a result, the overall system becomes compressed, resulting in photo-excited electron tunneling from the sensitizer (bis(4-diphenylamine-2-phenyl)-squarine or 1,4-bis(N,N-dimethylamino)naphthalene) to the pFA mols.  Absorption spectra as well as electron transfer trajectories assocd. with the different excited states were calcd. using time dependent d. functional theory methods.  The results allow sepn. of the quantum entangled photosynthetic transitions within the same minimal protocell and with the neighboring minimal protocell.  The transferred electron is used to cleave a "waste" org. mol. resulting in the formation of the desired product.  A two variable, quantum entangled AND logic gate was proposed, consisting of two input photoactive sensitizer mols. and one output (pFA mol.).  It is proposed that a similar process might be applied for the destruction of tumor cancer cells or to yield building blocks in artificial cells. [on SciFinder(R)]},
	keywords = {protocell quantum self assembly entanglement},
	isbn = {0169-6149},
	author = {Tamulis, Arvydas and Grigalavicius, Mantas and Baltrusaitis, Jonas.}
}
@article {112,
	title = {Polyvinylpyrrolidone surface modification with SiOx containing amorphous hydrogenated carbon (a-C:H/SiOx) and nitrogen-doped a-C:H/SiOx films using Hall-type closed drift ion beam source.},
	journal = {Thin Solid Films},
	volume = {538},
	year = {2013},
	note = {CAPLUS AN 2012:1904654(Journal; Online Computer File)},
	pages = {25 - 31},
	publisher = {Elsevier B.V.},
	abstract = {In this study SiOx contg. amorphous hydrogenated C (a-C:H/SiOx) and N-doped a-C:H/SiOx (a-C:H:N/SiOx) films were deposited on polyvinylpyrrolidone (PVP) templates of variable thickness using a Hall-type closed drift ion beam source with const. irradn. parameters.  A detailed surface characterization was followed using at. force microscopy (AFM) topog. images, surface morphol. parameters, height distribution histograms and bearing ratio curves with hybrid parameters.  The AFM anal. directly showed that the a-C:H/SiOx/PVP and a-C:H:N/SiOx/PVP composite films represent different morphologies with characteristic surface textures.  Surface adhesive properties were evaluated by measuring the force required to sep. the AFM tip from the surface by AFM force-distance curves.  The variance in adhesion force detected was lower for a-C:H/SiOx/PVP composite films due to lower structural homogeneity of the surfaces.  FTIR spectroscopy anal. was performed to study the blend behavior of PVP upon a-C:H/SiOx and a-C:H:N/SiOx direct ion beam deposition.  Interfacial interactions of PVP with the direct ion beam induced changes in the carbonyl group of the PVP and are dependent on the carrier gas used for the synthesis of the amorphous hydrogenated C films. [on SciFinder(R)]},
	keywords = {ion beam, polyvinylpyrrolidone PVP surface modification amorphous carbon silicon oxide},
	isbn = {0040-6090},
	author = {Lazauskas, A. and Grigaliunas, V. and Guobiene, A. and Puiso, J. and Prosycevas, I. and Baltrusaitis, J.}
}
@article {113,
	title = {Product-to-parent reversion of trenbolone: Unrecognized risks for endocrine disruption.},
	journal = {Science (Washington, DC, United States)},
	volume = {342},
	year = {2013},
	note = {CAPLUS AN 2013:1616444(Journal)},
	pages = {347 - 351},
	publisher = {American Association for the Advancement of Science},
	abstract = {Trenbolone acetate (TBA) is a high-value steroidal growth promoter often administered to beef cattle, whose metabolites are potent endocrine-disrupting compds.  We performed lab. and field phototransformation expts. to assess the fate of TBA metabolites and their photoproducts.  Unexpectedly, we obsd. that the rapid photohydration of TBA metabolites is reversible under conditions representative of those in surface waters (pH 7, 25{\textdegree}C).  This product-to-parent reversion mechanism results in diurnal cycling and substantial regeneration of TBA metabolites at rates that are strongly temp.- and pH-dependent.  Photoproducts can also react to produce structural analogs of TBA metabolites.  These reactions also occur in structurally similar steroids, including human pharmaceuticals, which suggests that predictive fate models and regulatory risk assessment paradigms must account for transformation products of high-risk environmental contaminants such as endocrine-disrupting steroids. [on SciFinder(R)]},
	keywords = {trenbolone metabolite reversion endocrine disruption environment risk},
	isbn = {0036-8075},
	author = {Qu, Shen and Kolodziej, Edward P. and Long, Sarah A. and Gloer, James B. and Patterson, Eric V. and Baltrusaitis, Jonas and Jones, Gerrad D. and Benchetler, Peter V. and Cole, Emily A. and Kimbrough, Kaitlin C. and Tarnoff, Matthew D. and Cwiertny, David M.}
}
@article {140,
	title = {Periodic DFT Study of Acidic Trace Atmospheric Gas Molecule Adsorption on Ca- and Fe-Doped MgO(001) Surface Basic Sites.},
	journal = {Journal of Physical Chemistry A},
	volume = {116},
	year = {2012},
	note = {CAPLUS AN 2012:993259(Journal; Online Computer File)},
	month = {2012///},
	pages = {7950 - 7958},
	publisher = {American Chemical Society},
	abstract = {The electronic properties of undoped and Ca- or Fe-doped MgO(001) surfaces, as well as their propensity toward atm. acidic gas (CO2, SO2, and NO2) uptake was investigated with an emphasis on gas adsorption on the basic MgO oxygen surface sites, Osurf, using periodic d. functional theory (DFT) calcns.  Adsorption energy calcns. show that MgO doping will provide stronger interactions of the adsorbate with the Osurf sites than the undoped MgO for a given adsorbate mol.  Charge transfer from the iron atom in Fe-doped MgO(001) to NO2 was shown to increase the binding interaction between adsorbate by an order of magnitude, when compared to that of undoped and Ca-doped MgO(001) surfaces.  Secondary binding interactions of adsorbate oxygen atoms were obsd. with surface magnesium sites at distances close to those of the Mg-O bond within the crystal.  These interactions may serve as a preliminary step for adsorption and facilitate further adsorbate transformations into other binding configurations.  Impacts on global atm. chem. are discussed as these adsorption phenomena can affect atm. gas budgets via altered partitioning and retention on mineral aerosol surfaces. [on SciFinder(R)]},
	keywords = {iron calcium doped magnesia atm gas adsorption DFT},
	isbn = {1089-5639},
	author = {Baltrusaitis, Jonas and Hatch, Courtney and Orlando, Roberto.}
}
@article {141,
	title = {Preservation of York Minster historic limestone by hydrophobic surface coatings.},
	journal = {Scientific Reports},
	volume = {2},
	year = {2012},
	note = {CAPLUS AN 2013:60154(Journal; Online Computer File)},
	month = {2012///},
	pages = {srep00880, 5 pp.},
	publisher = {Nature Publishing Group},
	abstract = {Magnesian limestone is a key construction component of many historic buildings that is under const. attack from environmental pollutants notably by oxides of sulfur via acid rain, particulate matter sulfate and gaseous SO2 emissions.  Hydrophobic surface coatings offer a potential route to protect existing stonework in cultural heritage sites, however, many available coatings act by blocking the stone microstructure, preventing it from {\textquoteright}breathing{\textquoteright} and promoting mold growth and salt efflorescence.  Here we report on a conformal surface modification method using self-assembled monolayers of naturally sourced free fatty acids combined with sub-monolayer fluorinated alkyl silanes to generate hydrophobic (HP) and super hydrophobic (SHP) coatings on calcite.  We demonstrate the efficacy of these HP and SHP surface coatings for increasing limestone resistance to sulfation and thus retarding gypsum formation under SO2/H2O and model acid rain environments.  SHP treatment of 19th century stone from York Minster suppresses sulfuric acid permeation. [on SciFinder(R)]},
	keywords = {archaeol limestone preservation surface coating},
	isbn = {2045-2322},
	author = {Walker, Rachel A. and Wilson, Karen and Lee, Adam F. and Woodford, Julia and Grassian, Vicki H. and Baltrusaitis, Jonas and Rubasinghege, Gayan and Cibin, Giannantonio and Dent, Andrew.}
}
@article {155,
	title = {Phomalevones A-C: Dimeric and pseudodimeric polyketides from a fungicolous Hawaiian isolate of Phoma sp. (Cucurbitariaceae).},
	journal = {Journal of Natural Products},
	volume = {74},
	year = {2011},
	note = {CAPLUS AN 2011:84225(Journal; Online Computer File)},
	month = {2011///},
	pages = {395 - 401},
	publisher = {American Chemical Society-American Society of Pharmacognosy},
	abstract = {Phomalevones A-C (1-3), three new compds. with bis-dihydroxanthone and bis-benzophenone systems, were isolated from cultures of a Hawaiian isolate of Phoma sp. (MYC-1734 = NRRL 39060; Cucurbitariaceae).  The structures of 1-3 were detd. by anal. of NMR and MS data.  The abs. configurations of the sp3 stereocenters in the monomeric unit of 1 were assigned by application of Mosher{\textquoteright}s method, and overall abs. configurations were proposed on the basis of ECD data using both computational methods and comparisons with literature data for model compds.  All three compds. showed antibacterial activity, and compds. 2 and 3 also exhibited antifungal effects. [on SciFinder(R)]},
	keywords = {phomalevone Phoma},
	isbn = {0163-3864},
	author = {Shim, Sang Hee and Baltrusaitis, Jonas and Gloer, James B. and Wicklow, Donald T.}
}
@article {168,
	title = {Photoactive WO3 and Se-WO3 thin films for photoelectrochemical oxidation of organic compounds.},
	journal = {Journal of Applied Electrochemistry},
	volume = {40},
	year = {2010},
	note = {CAPLUS AN 2010:636390(Journal)},
	month = {2010///},
	pages = {1337 - 1347},
	publisher = {Springer},
	abstract = {Thin films of bare and Se-contg. tungsten trioxide (WO3) on AISI 304-type stainless steel were prepd. by electrochem. deposition using peroxy-tungstate solns.  The obtained films were characterized by X-ray diffraction, photoelectron spectroscopy, SEM, thermal and photovoltammetry analyses.  The oxidn. of methylene blue, phenol, and methanol was used to evaluate the photoelectrocatalytic activity of the prepd. films.  It has been established that the incident photon-to-current efficiency (IPCE) in 0.1-M K2SO4 decreases as the concn. of methylene blue and phenol increases.  On the contrary, the IPCE values increase with the increase in initial concn. of methanol.  The bulk electrolysis expts. revealed that the prepd. films are stable and can be used for photoelectrochem. oxidn. of methanol. [on SciFinder(R)]},
	keywords = {electrodeposition tungsten oxide selenium film photoelectrochem oxidn catalyst, photoactive tungsten oxide selenium film photoelectrochem oxidn org compd},
	isbn = {0021-891X},
	author = {Ostachaviciute, Simona and Baltrusaitis, Jonas and Valatka, Eugenijus.}
}
@article {169,
	title = {Principles of electrochemical reduction of Na2MoO4 on a Se/SnO2/glass surface.},
	journal = {Chemine Technologija (Kaunas, Lithuania)},
	year = {2010},
	note = {CAPLUS AN 2010:548442(Journal)},
	month = {2010///},
	pages = {28 - 35},
	publisher = {Technologija},
	abstract = {Na2MoO4 electrochem. redn. from 0.22 mol/dm3 sodium citrate supporting soln. was investigated by the cyclic voltammetry, XPS and lateral force microscopy techniques.  Exptl. results have indicated that molybdenum oxide is initially deposited on the Se/SnO2/glass surface in a potential range from -0.20 V to -0.80 V.  XPS anal. exhibited the molybdenum oxide stoichiometry of 2.9.  The nucleation mechanism of MoOx onto Se/SnO2/glass surface was investigated by the current transient technique.  The deposition transients analyzed in the non-dimensional plots I2/I2m = f(t/tm) and I2/I2m = f(t/tm)2 have shown that MoOx nucleates according to a progressive mechanism.  The nucleation rate depends on Na2MoO4 concn. in the supporting electrolyte and on the deposition potential. [on SciFinder(R)]},
	keywords = {sodium molybdate electrochem redn tin dioxide selenium glass surface},
	isbn = {1392-1231},
	author = {Sinkeviciute, D. and Dukstiene, N. and Baltrusaitis, J. and Guobiene, A.}
}
@article {175,
	title = {Plasma etching of virtually stress-free stacked silicon nitride films.},
	journal = {Thin Solid Films},
	volume = {517},
	year = {2009},
	note = {CAPLUS AN 2009:661551(Journal)},
	month = {2009///},
	pages = {5769 - 5772},
	publisher = {Elsevier B.V.},
	abstract = {Stacked silicon nitride films for use in manufg. of surface micromachined membranes were deposited using custom made plasma-enhanced chem. vapor deposition instrument with silane (SiH4) and ammonia (NH3) gas mixt. as deposition precursor.  Deposition conditions were adjusted by varying substrate temp. and SiH4:NH3 flow ratio and temp. to obtain the required stress related and elec. properties of the membranes.  Transmission FTIR spectroscopy and SEM were used to investigate the chem. compn. and morphol. of the stacked film components.  An increase in the SiH4:NH3 flow ratio and a decrease in temp. resulted in a silicon-rich silicon nitride film, as well as an increased silicon oxide concn.  To avoid under-etch and sidewall defects, the plasma power d. during the plasma etching was changed from 0.5 W/cm2 during the etching of both top and bottom layers in a stacked film, to 1.0 W/cm2 during the etching of the middle both silicon and silicon oxide-rich film.  This resulted in an improved overall stacked film sidewall quality and reduced the unwanted under-etch. [on SciFinder(R)]},
	keywords = {stacked silicon nitride film CVD plasma etching property MEMS},
	isbn = {0040-6090},
	author = {Mikolajunas, M. and Baltrusaitis, J. and Kopustinskas, V. and Vanagas, G. and Grigaliunas, V. and Virzonis, D.}
}
