Export 1 results:
Title [ Year
] Filters: Author is Jakucionis, L. and Keyword is silicon nanopillar reactive ion etching gold chromium cluster [Clear All Filters]
"Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask." Thin Solid Films 520, no. 6 (2012): 2041-2045.