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Jakucionis, L.
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2012
Kaliasas, R.
,
J. Baltrusaitis
,
M. Mikolajunas
,
L. Jakucionis
, and
D. Virzonis
.
"
Scaling down lateral dimensions of silicon nanopillars fabricated by reactive ion etching with Au/Cr self-assembled clusters as an etch mask.
"
Thin Solid Films
520, no. 6 (2012): 2041-2045.
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