baltrusaitis lab @ lehigh

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Filters: Author is Virzonis, D. and Keyword is stacked silicon nitride film CVD plasma etching property MEMS  [Clear All Filters]
2009
Mikolajunas, M., J. Baltrusaitis, V. Kopustinskas, G. Vanagas, V. Grigaliunas, and D. Virzonis. "Plasma etching of virtually stress-free stacked silicon nitride films." Thin Solid Films 517, no. 19 (2009): 5769-5772.