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Kopustinskas, V.
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2009
Mikolajunas, M.
,
J. Baltrusaitis
,
V. Kopustinskas
,
G. Vanagas
,
V. Grigaliunas
, and
D. Virzonis
.
"
Plasma etching of virtually stress-free stacked silicon nitride films.
"
Thin Solid Films
517, no. 19 (2009): 5769-5772.
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