Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.

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TitleGreenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer.
Publication TypeJournal Article
Year of Publication2016
JournalAnalytical Chemistry (Washington, DC, United States)
Volume88
Issue13
Pagination6662 - 6665
AuthorsBarauskas, Dovydas, Donatas Pelenis, Darius Virzonis, John P. Baltrus, and Jonas. Baltrusaitis
PublisherAmerican Chemical Society
ISBN Number0003-2700
Keywordsgreenhouse gas carbon dioxide capacitive micromachined ultrasound transducer
Abstract

We manufd. and tested a capacitive micromachined ultrasound transducer (CMUT)-based sensor for CO2 detection at environmentally relevant concns. using polyethylenimine as a CO2 binding material. The assembly of a sensing chip was 10 × 20 mm, and up to 5 gases can potentially be detected simultaneously using a masking technique and different sensing materials. The limit of detection was calcd. to be 0.033 CO2 vol. % while the limit of quantification was calcd. to be 0.102%. The sensor exhibited a linear response between 0.06% and 0.30% CO2 while concns. close to those in flue gas can also be measured using diln. with inert gas. [on SciFinder(R)]