Export 1 results:
Title [ Year
] Filters: Author is Virzonis, D. and Keyword is plasma CVD stacked silicon nitride film surface micromachined membrane [Clear All Filters]
"A study of stacked PECVD silicon nitride films used for surface micromachined membranes." Thin Solid Films 516, no. 23 (2008): 8788-8792.