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Petruskevicius, Raimondas
,
Jonas Baltrusaitis
,
Darius Kezys
,
Marius Mikolajunas
,
Viktoras Grigaliunas
, and
Darius. Virzonis
.
"
E-beam lithography of computer generated holograms using fully vectorial 3D beam propagation method.
"
Microelectronic Engineering
87, no. 11 (2010): 2332-2337.
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